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■ 多轴密封传动形式(Multiaxial Sealed Spindles) |
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| 型号Model
Number |
CFF012NN |
耐真空度
Degree of vacuum pressure Pa{Torr} |
10-6[10-8] |
允许氦泄漏量
Leakae rate(He)[Pa.m3/sec] |
＜10-12 |
| [Torr.l/sec] |
＜10-11 |
耐压差
Pressure cappacity(Static)[kg/cm2] |
2.5 |
| 使用温度范围
Temperature range[℃] |
0～80 |
| 使用气体
Gas compatibility |
活性气体Reactive |
| 轴承型号
Bearing type |
外(out)6207 |
| 内(in)6901 |
| 轴承材质
Bearing material |
SUJ2 |
| 壳体材质
Housing material |
SUS303 |
| 转轴材质
shaft material |
SUS630 |
The
small and light weight model with high rotating
accuracy and small runout.
A typical application is a Wafer Transfer
Robot in Vacuum.(Called a SCARA type robot.) |
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| 型号Model
Number |
CFL200NN |
耐真空度
Degree of vacuum pressure Pa{Torr} |
10-6[10-8] |
允许氦泄漏量
Leakae rate(He)[Pa.m3/sec] |
＜10-12 |
| [Torr.l/sec] |
＜10-11 |
耐压差
Pressure cappacity(Static)[kg/cm2] |
2.0 |
| 使用温度范围
Temperature range[℃] |
0～80 |
| 使用气体
Gas compatibility |
非活性气体Inert |
| 轴承型号
Bearing type |
(out)6840 |
| (in)6906 |
| 轴承材质
Bearing material |
SUJ2 |
| 壳体材质
Housing material |
A202 |
| 转轴材质
shaft material |
SUS630 |
Three axis type with high stiffiness,provides
high rotating accuracy and small runout.
The optional aluminum housing can be used
to minimize the weight of the assembly.
A typical application is a Transfer Robot
in Vacuum,designed for handing large glass
substrates for LCD manufacturing (called
a Frong arm type.)
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上海凯日机电设备制造有限公司
销售公司:上海凯海机电设备制造有限公司 地址:上海市齐齐哈尔路124号
邮编：200080
Shanghai Sky Electromechanic Devices Manufacturing
Co., Ltd.
Saling Co.: Shanghai Kede Equipment Co.,Ltd.
Addess:No.149,Qiqihaer Rd,shanghai P.C.: 200080
电话:86-21-65893560 55216163 传真:86-21-55213140
55216163
Http://www.sky886.com E-mail:Sales@sky886.com
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